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Preparation of the hard CN x thin films using NO ambient gas by pulsed laser deposition

✍ Scribed by Aoqui, Shin-ichi; Ohshima, Tamiko; Ikegami, Tomoaki; Ebihara, Kenji

Book ID: 122280390
Publisher: Institute of Physics and National Institute of Materials Science
Year: 2001
Tongue: English
Weight: 252 KB
Volume: 2
Category: Article
ISSN: 1468-6996
DOI: 10.1016/S1468-6996(01)00134-6

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