Preparation of ZnMgO:Ga thin films on flexible substrates by pulsed laser deposition

✍ Scribed by W. Yuan; L.P. Zhu; Z.Z. Ye; X.Q. Gu

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 208 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.09.003

✦ Synopsis

Transparent conducting ZnMgO:Ga films were deposited on flexible PET substrates by pulsed laser deposition (PLD). Effects of deposition pressure and time on the structural, electrical and optical properties of ZnMgO:Ga films were investigated. The films showed a low resistivity about 7.68 Â 10 À4 V cm when deposited at the pressure of 0.03 Pa for 40 min. All the films exhibited a high transmittance over 80% in the visible and near-ultraviolet region. The band gap of as-grown films was about 3.50 eV.