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Preparation of SrRuO3 films for advanced CMOS metal gates

✍ Scribed by K. Fröhlich; K. Hušeková; D. Machajdík; R. Lupták; M. Ťapajna; J.C. Hooker; F. Roozeboom; A.P. Kobzev; C. Wiemer; S. Ferrari; M. Fanciulli; C. Rossel; C. Cabral Jr

Book ID
103846314
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
274 KB
Volume
7
Category
Article
ISSN
1369-8001

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Preparation of zinc oxide/metal oxide mu
Preparation of zinc oxide/metal oxide multilayered thin films for low-voltage varistors
✍ N Horio; M Hiramatsu; M Nawata; K Imaeda; T Torii 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 288 KB

Zinc oxide/metal oxide multilayered composite thin film varistors have been fabricated by the radio-frequency (RF, 13.56 MHz) sputtering method and the electrical properties of the films were investigated. After the Au electrode was formed on a quartz substrate by vacuum evaporation, zinc oxide (ZnO