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Preparation of Sr-Ferrite Films by RF-Sputtering and Magnetic Properties

✍ Scribed by Nakata, J.; Iwata, S.; Uchiyama, S.

Book ID
119818526
Publisher
Institute of Electrical and Electronics Engineers
Year
1988
Weight
493 KB
Volume
3
Category
Article
ISSN
0882-4959

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Preparation of thin ferrite films on sil
Preparation of thin ferrite films on silicon using RF sputtering
✍ Koblischka, M. R. ;Kirsch, M. ;Brust, M. ;Koblischka-Veneva, A. ;Hartmann, U. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 883 KB

## Abstract Thin‐films of Ni__~x~__ Zn~1–__x__~ Fe~2~O~4~ [(Ni,Zn)‐ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We find that the ferrite can be sputtered directly onto the Si surfaces, but