Preparation of PZT(53/47) thick films deposited by a dip-coating process
โ Scribed by Xi-Yun He; Ai-Li Ding; Xin-Sen Zheng; Ping-Sun Qiu; Wei-Gen Luo
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 421 KB
- Volume
- 66
- Category
- Article
- ISSN
- 0167-9317
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โฆ Synopsis
Crack-free polycrystalline PZT (PbZrTiO ) thick films up to 15 mm with perovskite structure have been 3 prepared from a dip-coating process. The influence of substrate characteristics, withdrawal speed and ionic concentration of precursor solution on the morphology and microstructure of PZT film was examined. The dielectric, ferroelectric and piezoelectric properties of PZT thick films on Pt / Ti substrate were measured and evaluated. PZT(53 / 47) thick films on Pt / Ti substrate exhibits a excellent electric properties, e.g.
๐ SIMILAR VOLUMES
Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan ฮด) of the as-deposited film measured at 100 kHz are 223 and 0.034, res