Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan ฮด) of the as-deposited film measured at 100 kHz are 223 and 0.034, res
โฆ LIBER โฆ
Fiber laser annealing of nanocrystalline PZT thick film prepared by aerosol deposition
โ Scribed by So Baba; Jun Akedo
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 602 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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Crack-free polycrystalline PZT (PbZrTiO ) thick films up to 15 mm with perovskite structure have been 3 prepared from a dip-coating process. The influence of substrate characteristics, withdrawal speed and ionic concentration of precursor solution on the morphology and microstructure of PZT film was