A novel process for the preparation of t
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Feyh, A. ;Laermer, F. ;KronmΓΌller, S. ;Mokwa, W.
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Article
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2005
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John Wiley and Sons
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English
β 145 KB
## Abstract A novel process for the preparation of thick porous silicon layers having very high porosities is proposed. Starting with thick layers of intermediate porosity the porosity is further increased in an additional step. This is done by means of controlled partial oxidation of the silicon s