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Photoluminescence of high porosity and of electrochemically oxidized porous silicon layers

✍ Scribed by A. Bsiesy; J.C. Vial; F. Gaspard; R. Herino; M. Ligeon; F. Muller; R. Romestain; A. Wasiela; A. Halimaoui; G. Bomchil

Publisher
Elsevier Science
Year
1991
Weight
64 KB
Volume
254
Category
Article
ISSN
0167-2584

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πŸ“œ SIMILAR VOLUMES

A novel process for the preparation of t
A novel process for the preparation of thick porous silicon layers with very high porosity
✍ Feyh, A. ;Laermer, F. ;KronmΓΌller, S. ;Mokwa, W. πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 145 KB

## Abstract A novel process for the preparation of thick porous silicon layers having very high porosities is proposed. Starting with thick layers of intermediate porosity the porosity is further increased in an additional step. This is done by means of controlled partial oxidation of the silicon s