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Preparation of porous alumina abrasives and their chemical mechanical polishing behavior

✍ Scribed by Hong Lei; Xin Wu; Ruling Chen

Book ID: 113937485
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 887 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.11.057

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