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Preparation of porous Fe2O3/SiO2 nanocomposite abrasives and their chemical mechanical polishing behaviors on hard disk substrates

✍ Scribed by Hu Li; Hong Lei; Ruling Chen


Book ID
113937749
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
794 KB
Volume
520
Category
Article
ISSN
0040-6090

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