Preparation of silane modified SiO2 abrasive particles and their Chemical Mechanical Polishing (CMP) performances

✍ Scribed by GuoShun Pan; ZhongHua Gu; Yan Zhou; Tuo Li; Hua Gong; Yan Liu

• Book ID: 113952420
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 593 KB
• Volume: 273
• Category: Article
• ISSN: 0043-1648
• DOI: 10.1016/j.wear.2011.05.044