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Preparation of PbTiO3 thin films by dc single-target sputtering

✍ Scribed by Yang Bangchao; Wan Juyong; Jia Yuming; Huang Yongli


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
119 KB
Volume
42
Category
Article
ISSN
0042-207X

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This paper describes the deposition of high-quality zinc oxide (ZnO) thin film by reactive dc target-facing-type sputtering (DC-TFTS) using an arc killer that periodically applies a positive pulse to the negative dc discharge current. High-speed deposition of high-quality thin film, which is a merit