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Preparation of orientated aluminium nitride films by radio-frequency reactive sputtering

✍ Scribed by K. Sugiyama; K. Taniguchi; K. Kuwabara

Publisher: Springer
Year: 1990
Tongue: English
Weight: 343 KB
Volume: 9
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf00721039

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