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Preparation of low-noise high-quality silicon microstrip detectors

✍ Scribed by F. Nava; A. Magnani; G. Ottaviani; R. Tonini; A.Alberigi Quaranta; P. Cantoni; P.L. Frabetti; V. Lelli; L. Stagni; P. Lichard; R. Janik; F. Palombo; P.F. Manfredi

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
411 KB
Volume
290
Category
Article
ISSN
0168-9002

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Processing high-quality silicon for micr
Processing high-quality silicon for microstrip detectors
✍ F. Nava; G. Ottaviani; R. Tonini; S. Frabboni; A.Alberigi Quaranta; P. Cantoni; πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 558 KB

An investigation has been made into the behaviour of high-purity silicon (HP-%) during the fabrication of microstrip detectors. The resistivity of the silicon used is 3 kS1 cm. The investigation is centred on standard bipolar processes based on ion implantation. It is found that, comparing the proce