✦ LIBER ✦

Preparation of low defect grade a-Si:H films by RF magnetron sputtering technique

✍ Scribed by W. Müller; J. Pirrung; B. Schröder; J. Geiger

Publisher: Elsevier Science
Year: 1984
Weight: 903 KB
Volume: 10
Category: Article
ISSN: 0165-1633
DOI: 10.1016/0165-1633(84)90059-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation of five-layered Si/SixGe1−x

Preparation of five-layered Si/SixGe1−x nano-films by RF helicon magnetron sputtering

✍ S. Tanemura; L. Miao; T. Watanabe; M. Imaoka; M. Tanemura; Y. Mori 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 397 KB

Low-temperature operation of thin film s

Low-temperature operation of thin film solid oxide fuel cells prepared by RF magnetron sputtering

✍ Akiyoshi Nagata; Akifumi Nishimoto 📂 Article 📅 2009 🏛 Wiley (John Wiley & Sons) 🌐 English ⚖ 693 KB

Preparation and characterization of boro

Preparation and characterization of boron doped a-SiC:H films by dc-magnetron sputtering technique

✍ S Uthanna; B Schröder; H Oechsner 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 372 KB

Preparation of superconducting YBaCuO

Preparation of superconducting YBaCuO thin films by rf magnetron sputtering

✍ Huang Zongtan; Li Gouzhen; Zhen Guangli; Huang Jiangping 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 121 KB

Structural and optical properties of a-S

Structural and optical properties of a-Si1−xCx:H films synthesized by dc magnetron sputtering technique

✍ Aïssa Keffous; Abdelhak Cheriet; Youcef Belkacem; Noureddine Gabouze; Assia Bouk 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 731 KB

Hydrogenated amorphous SiC films (a-Si 1-x C x :H) were prepared by dc magnetron sputtering technique on p-type Si(1 0 0) and corning 9075 substrates at low temperature, by using 32 sprigs of silicon carbide (6H-SiC). The deposited a-Si 1-x C x :H film was realized under a mixture of argon and hydro

Study on the structural properties of a-

Study on the structural properties of a-Si1−xSnx: H films prepared by rf sputtering

✍ Chen Guang-hua; Zhang Fang-qing; Zhang Nan-ping; He De-yan 📂 Article 📅 1985 🏛 Elsevier Science ⚖ 389 KB