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Preparation of five-layered Si/SixGe1−x nano-films by RF helicon magnetron sputtering

✍ Scribed by S. Tanemura; L. Miao; T. Watanabe; M. Imaoka; M. Tanemura; Y. Mori

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
397 KB
Volume
254
Category
Article
ISSN
0169-4332

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A systematic spectroscopic investigation of Pb x La 1Àx Ti 1Àx/4 O 3 (PLT) thin films grown on PbO x /Pt/Ti/SiO 2 /Si substrate by RF magnetron sputtering was performed by using confocal Raman spectroscopy. Influence of the growth condition modification including different growth temperatures, with