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Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

✍ Scribed by Wan-Young Chung; Go Sakai; Kengo Shimanoe; Norio Miura; Duk-Dong Lee; Noboru Yamazoe

Book ID
108469948
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
488 KB
Volume
46
Category
Article
ISSN
0925-4005

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## Abstract Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 °C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are con