Preparation of highly photoconductive hydrogenated amorphous silicon carbide films with a multiplasma-zone apparatus

✍ Scribed by A Asano; T Ichimura; H Sakai

• Book ID: 115986648
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 178 KB
• Volume: 114
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(89)90104-x