Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties

✍ Scribed by S. Nitta; A. Hatano; M. Yamada; M. Watanabe; M. Kawai

• Book ID: 118332420
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 155 KB
• Volume: 59-60
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(83)90643-9