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Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric properties

✍ Scribed by Takayama, Ryoichi; Tomita, Yoshihiro


Book ID
120080232
Publisher
American Institute of Physics
Year
1989
Tongue
English
Weight
709 KB
Volume
65
Category
Article
ISSN
0021-8979

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## Ž . Ž . Ž . We have grown thin Pb Zr Ti O PZT films on PtrSiO rSi substrates by pulsed laser ablation PLA and x 1yx 3 2 Ž . subsequent rapid thermal annealing RTA . X-ray diffraction analysis showed that the crystallographic orientation of PZT Ž . films after RTA clearly depended on the micros