Preparation of epitaxial films of the transparent conductive oxide Al:ZnO by reactive high-pressure sputtering in Ar/O 2 mixtures

✍ Scribed by Van Gompel, M.; Conings, B.; Jiménez Monroy, K. L.; D‘Haen, J.; Gilissen, K.; D‘Olieslaeger, M.; Van Bael, M. K.; Wagner, P.

• Book ID: 120310017
• Publisher: John Wiley and Sons
• Year: 2013
• Tongue: English
• Weight: 464 KB
• Volume: 210
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.201200986