Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

✍ Scribed by S. Mineta; M. Kohata; N. Yasunaga; Y. Kikuta

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 818 KB
• Volume: 189
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90033-a