7521. Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply: S Mineta et al,Thin Solid Films, 189, 1990, 125–138

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 156 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91589-g