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Preparation of amorphous composites of silicon nitride and carbon layers on silica glass by chemical vapor deposition method

✍ Scribed by Andrzej Kwatera; Agata Sawka

Book ID: 117150413
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 478 KB
Volume: 265
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00886-8

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