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Preparation and properties of sputtered “glassy” carbon films

✍ Scribed by Zivka Marinkovic; Rustum Roy

Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
416 KB
Volume
14
Category
Article
ISSN
0008-6223

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Cobalt oxide films, fabricated by reactive sputtering m a 100% pure 0, plasma are highly nonstolchlometrlc with a bulk oxygen to cobalt ratlo of -1 15 Conversely, surface XPS studies mdlcate an oxygen to cobalt ratio rangmg from 1 8 to 3 0 and show the presence of Co3+ only m the surface reuon of th