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Semiconducting and electrocatalytic properties of sputtered cobalt oxide films

✍ Scribed by Lynn C. Schumacher; Ingo B. Holzhueter; Ian R. Hill; Michael J. Dignam


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
698 KB
Volume
35
Category
Article
ISSN
0013-4686

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✦ Synopsis


Cobalt oxide films, fabricated by reactive sputtering m a 100% pure 0, plasma are highly nonstolchlometrlc with a bulk oxygen to cobalt ratlo of -1 15 Conversely, surface XPS studies mdlcate an oxygen to cobalt ratio rangmg from 1 8 to 3 0 and show the presence of Co3+ only m the surface reuon of the as formed films Infrared and Raman spectra however confirm the presence of both Co3+ and Co*+ m the bulk and m&ate that these highly defective films possess the spmel structure Photoelectrochemlcal and Impedance studies show that the sputtered oxide IS a highly doped p-type semlconductor with an mdlrect bandgap of Es -1 50 eV The electrocatalytlc properties of these oxide films for oxygen reduction and evolution are reported


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## Abstract Rf magnetron sputtering technique was employed for preparation of tantalum oxide films on quartz and crystalline silicon (111) substrates held at room temperature by sputtering of tantalum in an oxygen partial pressure of 1x10^‐4^ mbar. The films were annealed in air for an hour in the