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Luminescent properties of sputtered ZnO thin films

✍ Scribed by T. Minami; H. Nanto; S. Takata


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
300 KB
Volume
24-25
Category
Article
ISSN
0022-2313

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This paper describes the deposition of high-quality zinc oxide (ZnO) thin film by reactive dc target-facing-type sputtering (DC-TFTS) using an arc killer that periodically applies a positive pulse to the negative dc discharge current. High-speed deposition of high-quality thin film, which is a merit