𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Texture of obliquely sputtered ZnO thin films

✍ Scribed by I. Červeň; T. Lacko; I. Novotný; V. Tvarožek; M. Harvanka

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
331 KB
Volume
131
Category
Article
ISSN
0022-0248

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation of piezoelectric ZnO thin fi
Preparation of piezoelectric ZnO thin films by target-facing-type sputtering method
✍ Ken-ya Hashimoto; Syotaro Ogawa; Akinori Nonoguchi; Tatsuya Omori; Masatsune Yam 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 231 KB 👁 1 views

This paper describes the deposition of high-quality zinc oxide (ZnO) thin film by reactive dc target-facing-type sputtering (DC-TFTS) using an arc killer that periodically applies a positive pulse to the negative dc discharge current. High-speed deposition of high-quality thin film, which is a merit

The Study of Sputtered Barium Ferrite Th
The Study of Sputtered Barium Ferrite Thin Films
✍ Liu, Xiaoxi ;Bai, Jianmin ;Wei, Fulin ;ZhengLiu, Yang ;Morisako, A. ;Matsumoto, 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 209 KB 👁 2 views