Preparation and properties of phosphorus-containing pyrocarbon —I. Chemical-vapour-codeposition of carbon and phosphorus

✍ Scribed by S. Marinkovic; C. Suznjevic; A. Tukovic; I. Dezarov; Cerovic d

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 407 KB
• Volume: 11
• Category: Article
• ISSN: 0008-6223
• DOI: 10.1016/0008-6223(73)90023-7

✦ Synopsis

Chemical vapour codeposition of carbon and phosphorus was effected from a CH4 + PC&+ H2 gas mixture at deposition temperatures ranging from 1220" to 1730°C. fin a total gas pressure of 133 mbar and with I-15 vol '% PCl:% in the gas mixture. The product of the codeposition is a pyrocarbon containing phosphorus. Maximum phosphorus concentration which can be retained in the product decreases with deposition tenperature from 4-5 w/o at 1220°C to -0% at 1530°C~. The distribution of the retained phosphorus in the product is quasi-uniform, with onI\ a small part ot. it present ah a separate phase, the elementary red phosphorus. The'interlayer spacing of the pyrocarbon containing phosphorus increases with phosphorus content up to 3.46 .q. Othcl properties of the pyrocarbon are affected to a lesser degree by the presence of phosphorus: apparent density, lattice strain and microhardness increase, whereas preferred orientation and crystallite height lowered. The results suggest that the main quantit? of' the codeposited phosphorus is present in the p),rocarbon in substitutional solid solution.