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Preparation and photoluminescence of nanocrystalline Si-rich silicon oxide films by PECVD

✍ Scribed by Guohua Shi; Gang Xu; Gaorong Han


Book ID
113790072
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
260 KB
Volume
61
Category
Article
ISSN
0167-577X

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Mechanism of photoluminescence of silico
✍ T.V. Torchynska; J. Aguilar-Hernandez; L. Schacht HernΓ‘ndez; G. Polupan; Y. Gold πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 380 KB

Photoluminescence peculiarities of silicon oxide films enriched by Si or Ge have been investigated. Photoluminescence (PL) and Raman spectra were measured before and after thermal annealing at 800 8C. The dependences of PL peculiarities on the concentration of Si and Ge, as well as on the existence