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Preparation and Characterization of Nanostructured Tin Oxide Films by Electrochemical Deposition

โœ Scribed by Chang, S. T.; Leu, I. C.; Hon, M. H.

Book ID
127036849
Publisher
The Electrochemical Society
Year
2002
Tongue
English
Weight
236 KB
Volume
5
Category
Article
ISSN
1099-0062

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Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic