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Preparation and characterization of indium oxide film by electrochemical deposition

โœ Scribed by W.H. Ho; S.K. Yen

Book ID
108288923
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
278 KB
Volume
498
Category
Article
ISSN
0040-6090

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Preparation and characterization of indi
Preparation and characterization of indium tin oxide films formed by oxygen ion beam assisted deposition
โœ C. Liu; T. Mihara; T. Matsutani; T. Asanuma; M. Kiuchi ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 195 KB

Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic