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Preparation and characterization of nanocrystalline cubic boron nitride by microwave plasma-enhanced chemical vapor deposition

✍ Scribed by Saitoh, Hidetoshi; Yarbrough, Walter A.


Book ID
120405143
Publisher
American Institute of Physics
Year
1991
Tongue
English
Weight
722 KB
Volume
58
Category
Article
ISSN
0003-6951

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