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Plasma enhanced chemical vapor deposition and characterization of boron nitride gate insulators on InP

✍ Scribed by Bath, A.; van der Put, P. J.; Becht, J. G. M.; Schoonman, J.; Lepley, B.


Book ID
121819644
Publisher
American Institute of Physics
Year
1991
Tongue
English
Weight
771 KB
Volume
70
Category
Article
ISSN
0021-8979

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