✦ LIBER ✦
Study of boron nitride gate insulators grown by low temperature plasma enhanced chemical vapor deposition on InP
✍ Scribed by A. Bath; P.J. van der Put; J. Schoonman; B. Lepley
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 207 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0169-4332
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