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Preparation and characterization of multilayer metallization structures with titanium nitride and titanium silicide

✍ Scribed by P Panjan; B Navinšek; A Žabkar; D Mandrino; M Godec; M Koželj; Z Krivokapič; A Zalar

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 348 KB
Volume: 181
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90470-7

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