Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation

✍ Scribed by E. D'Anna; G. Leggieri; A. Luches; M. Martino; A. Perrone; P. Mengucci; I.N. Mihailescu

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 372 KB
• Volume: 54
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90070-e