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Preparation and characterisation of a-C and a-C:H coatings deposited by pulsed magnetron sputtering

✍ Scribed by Andrzej Czyzniewski

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
694 KB
Volume
203
Category
Article
ISSN
0257-8972

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Preparation and tribological behavior of
Preparation and tribological behavior of TiN/a-C composite films deposited by DC magnetron sputtering
✍ X.H. Zheng; J.P. Tu; B. Gu; S.B. Hu πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 442 KB

TiN/amorphous carbon (a-C) composite films were deposited onto steel substrate by DC magnetron sputtering with different ratios of graphite to Ti in target and at a substrate temperature of 200 β€’ C. The hardness, composition, morphology and microstructure of the composite films were characterized by