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Preferential sputtering from isotopic mixtures and alloys of near-neighbor elements

✍ Scribed by Peter Sigmund


Book ID
114168003
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
883 KB
Volume
18
Category
Article
ISSN
0168-583X

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture