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Preferential sputtering effects in tantalum nitride thin films

✍ Scribed by C Palacio; J.M Sanz; J.M Martínez-Duart

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 241 KB
Volume: 124
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90272-x

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