✦ LIBER ✦

Precursor Selection in Halide CVD of Oxides

✍ Scribed by Anders Hårsta

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 391 KB
Volume: 5
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199908)5:4<191::aid-cvde191>3.0.co;2-u

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

ChemInform Abstract: Precursor Selection

ChemInform Abstract: Precursor Selection in Halide CVD of Oxides

✍ Anders Haarsta 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 23 KB 👁 2 views

Phase-Selective CVD of Vanadium Oxide Na

Phase-Selective CVD of Vanadium Oxide Nanostructures

✍ S. Mathur; T. Ruegamer; I. Grobelsek 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 453 KB

Phase-Selective CVD of Chromium Oxides f

Phase-Selective CVD of Chromium Oxides from Chromyl Chloride

✍ Y.-N. Cho; W.J. DeSisto 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 220 KB

New Precursors for the CVD of Zirconium

New Precursors for the CVD of Zirconium and Hafnium Oxide Films

✍ J.-S. M. Lehn; S. Javed; D. M. Hoffman 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 270 KB

Growth of Thin Films of Molybdenum and T

Growth of Thin Films of Molybdenum and Tungsten Oxides by Combustion CVD Using Aqueous Precursor Solutions

✍ M.J. Davis; G. Benito; D.W. Sheel; M.E. Pemble 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 292 KB 👁 1 views

Vapor Pressures of Precursors for the CV

Vapor Pressures of Precursors for the CVD of Titanium Nitride and Tin Oxide

✍ A. M. B. van Mol; J. P. A. M. Driessen; J. L. Linden; M. H. J. M. de Croon; C. I 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 314 KB 👁 2 views