✦ LIBER ✦

Precursor design and selective aluminum CVD

✍ Scribed by K Tsubouchi; K Masu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Single-Source-Precursor CVD: Alkoxy and

✍ Michael Veith 📂 Article 📅 2007 🏛 John Wiley and Sons ⚖ 11 KB

Precursor Selection in Halide CVD of Oxi

✍ Anders Hårsta 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 391 KB 👁 1 views

ChemInform Abstract: Precursor Selection

✍ Anders Haarsta 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 23 KB 👁 2 views

Design and synthesis of CVD precursors t

✍ L.V. Interrante; B. Han; J.B. Hudson; C. Whitmarsh 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 294 KB

MO CVD precursors and reactions mechanis

✍ F.A. Kuznetsov; I.K. Igumenov; V.S. Danilovich 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 202 KB

Large scale two-step selective aluminum

✍ B. Haba; K. Sugai; Y. Morishige; S. Kishida 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 285 KB