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Precipitation of oxygen in single-crystal silicon implanted with high doses of oxygen

✍ Scribed by P.L.F. Hemment; E.A. Maydell-Ondrusz; J.E. Castle; R. Paynter; M.C. Wilson; R.G. Booker; J.A. Kilner; R.P. Arrowsmith


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
549 KB
Volume
128
Category
Article
ISSN
0040-6090

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