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Preanneal effect on the ring‐shaped distribution of oxygen precipitates in Czochralski‐grown silicon

✍ Scribed by Ono, Haruhiko; Ikarashi, Taeko; Kimura, Shigeru; Tanikawa, Akio

Book ID: 118224130
Publisher: American Institute of Physics
Year: 1994
Tongue: English
Weight: 675 KB
Volume: 76
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.357059

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