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Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements

✍ Scribed by Sha Xia; Nihtianov, S.

Book ID: 114632365
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 743 KB
Volume: 61
Category: Article
ISSN: 0018-9456
DOI: 10.1109/tim.2011.2178678

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