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Power-dependent structural, morphological and electrical properties of electron beam evaporated tantalum films

✍ Scribed by Nishat Arshi,Junqing Lu,Chan Gyu Lee,Bon Heun Koo…

Book ID
126368401
Publisher
The Korean Institute of Metals and Materials
Year
2013
Tongue
English
Weight
490 KB
Volume
9
Category
Article
ISSN
1738-8090

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