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Powder Synthesis and Characterization of Amorphous Carbon Nitride

โœ Scribed by Khabashesku, Valery N.; Zimmerman, John L.; Margrave, John L.


Book ID
121082379
Publisher
American Chemical Society
Year
2000
Tongue
English
Weight
195 KB
Volume
12
Category
Article
ISSN
0897-4756

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Characterization of low dielectric const
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## ลฝ . Amorphous carbon nitride a-CN films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency