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Possible role of oxygen impurities in degradation of nc-TiN∕a-Si[sub 3]N[sub 4] nanocomposites

✍ Scribed by Veprek, Stan; Karvankova, Pavla; Veprek-Heijman, Maritza G. J.

Book ID: 121700007
Publisher: AVS (American Vacuum Society)
Year: 2005
Tongue: English
Weight: 757 KB
Volume: 23
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.2131086

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