𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Possible method of reducing annealing temperatures of radiation defects in ion-implanted silicon carbide

✍ Scribed by Z. V. Dzhibuti; N. D. Dolidze; G. Sh. Narsiya; G. L. Éristavi


Book ID
110123078
Publisher
SP MAIK Nauka/Interperiodica
Year
1997
Tongue
English
Weight
40 KB
Volume
23
Category
Article
ISSN
1063-7850

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Annealing studies of cluster defects in
✍ M.A. Gad; J.H. Evans-Freeman 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 166 KB

High resolution Laplace deep level transient spectroscopy (LDLTS) has been applied to investigate the annealing behaviour of small cluster defects in n-type Si. The Si was implanted with either Ge or Si, with energies 1500 keV and 850 keV respectively, and doses of 1 • 10 10 cm À2 . The low dose ens