✦ LIBER ✦

Annealing of defects created in silicon by MeV ion implantation

✍ Scribed by L. Sealy; R.C. Barklie; W.L. Brown; D.C. Jacobson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Annealing studies of point defects in lo

✍ J. Lalita; B.G. Svensson; C. Jagadish; A. Hallén 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 508 KB

Defect evolution in MeV ion-implanted si

✍ J. Lalita; N. Keskitalo; A. Hallén; C. Jagadish; B.G. Svensson 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 648 KB

Defect interaction by dual MeV ion impla

✍ Jae-Sang Ro; Nam-Hoon Cho 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 140 KB

Near-surface defects formed by MeV ion i

✍ H. Sayama; A. Kinomura; Y. Yuba; M. Takai 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 335 KB

Distribution of paramagnetic defects for

✍ Y. Yajima; N. Natsuaki; K. Yokogawa; S. Nishimatsu 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 477 KB

Diffusion and defect annealing in silico

✍ Titov, V. V. 📂 Article 📅 1970 🏛 John Wiley and Sons 🌐 English ⚖ 400 KB